Pattern matching is best known for its use in detecting lithographic hotspots, but it’s also widely used across all physical verification flows, and has expanded into design-for-manufacturing (DFM) ...
A lithographic (litho) hotspot is a defect on a wafer that is created during manufacturing by a combination of systematic process variation and resolution enhancement technology (RET) limitations.
To help designers find complex features with a design implementation, physical verification and DFM tools may employ pattern matching techniques. That is, a designer can simply copy a particular ...