Brooks Instrument, a leader in precision fluid measurement and control technology, has released the new GP200 Series, the first fully pressure-insensitive pressure-based mass flow controller (P-MFC) ...
The SLAMf series of elastomer-sealed, IP66-rated thermal mass flow controllers (MFCs) now offer Class I/Division 2 and Zone 2 approvals for hazardous and harsh environments. These MFCs are also ...
The GP200 Series is a fully pressure-insensitive pressure-based mass flow controller (P-MFC) designed specifically for etch and chemical vapor deposition (CVD) processes in semiconductor manufacturing ...
Brooks Instrument, a world leader in advanced flow, pressure and vapor delivery solutions, has released a new SLAMf Series of elastomer-sealed, IP66-rated thermal mass flow controllers (MFCs) with ...