Prediction of line-and-space pattern after etching based on scanning electron microscope image of corresponding resist pattern using machine learning
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Prediction of line-and-space pattern after etching based on scanning electron microscope image of corresponding resist pattern using machine learning
Scanning electron microscopy (SEM) image is an indispensable device in inspection of photoresist and etched Si patterns. On the other hand, extreme ultraviolet (EUV) radiation offers high resolution in lithography fabrication. Owing to the application of EUV, the feature size of photomask produced by electron beam (EB) lithography is reduced as ...
May 25, 2022
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